Misc - MIKI Hirofumi

Piezoelectric PVDF Wet Etching Using Polar Solvents as the Etchant

Riko Yoshida, Hirofumi Miki （Part： Corresponding author )

Proceedings of the 35th 2024 International Symposium on “Micro-NanoMechatronics and Human Science” Micro & Nano Scale Systems to Robotics & Mechatronics Systems,     SaP-08   2024.11  [Refereed]

Effects of Applied Load Direction to the Output Behavior of Piezoelectric Fingerprint Sensor

Jippo Kai, Hirohumi Miki （Part： Corresponding author )

Proceedings of 35th 2024 International Symposium on Micro-NanoMechatronics and Human Science     SaP-07   2024.11  [Refereed]

Fabrication Process Technology to Realize Two-layer Thick Structures Using SU-8 3050 Applicable to the Casting Mold of Microneedle Devices

Yusuke Yamamoto, Rina Kusushita, Hirofumi Miki （Part： Corresponding author )

Proceedings of the 35th 2024 International Symposium on “Micro-NanoMechatronics and Human Science” Micro & Nano Scale Systems to Robotics & Mechatronics Systems.     SaP-05   2024.11  [Refereed]

乳癌検出用触診デバイスの構造解析用生体モデルの検討

山崎 智也, 幹 浩文 （Part： Corresponding author )

第40回「センサ・マイクロマシンと応用システム」シンポジウム     8P2-PS-24 - S-177   2023.11  [Refereed]

Study on the Piezoelectric PVDF Film Wet Etching

吉田 理子, 幹 浩文 （Part： Corresponding author )

第40回「センサ・マイクロマシンと応用システム」シンポジウム     7P2-PS-21 - S-069   2023.11  [Refereed]

圧電方式の指紋センサに関する基礎検討

堀口 凱生, 幹 浩文 （Part： Corresponding author )

第40回「センサ・マイクロマシンと応用システム」シンポジウム     6P5-PS-25 - S-064   2023.11  [Refereed]

Research on the piezoelectric PVDF film weteching properties in DMA solution

K. Yoshida, H. Miki

39th Symposium of Sensor・actuators and Application systems   39   16P2-P-21   2022.11  [Refereed]

Electro active chemical Marangoni locomotor

S. Tsuchitani, T. Ikebe, and H. Miki

9th international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles (EuroEAP2019) ( The EuroEAP Society )    21   2019.06  [Refereed]

Electric field control of propulsion force of chemically driven Marangoni locomotor

S. Tsuchitani, T. Ikebe, H. Miki, and K. Kikuchi

ASME 2018 International Mechanical Engineering Congress & Exposition ( The American Society of Mechanical Engineers )    IMECE2018-87233   2018.11  [Refereed]

Etching properties of piezoelectric β-phase poly (vinylidene fluoride) film

Hirofumi Miki, R. Sugii, S.Tsuchitani

4th World Congress on Materials Science & Engineering ( Scientific Future Group )    48   2018.08  [Refereed]

A Novel structure of microneedle device and its fabrication technology by using biocompatible polyvinyl alcohol (PVA) and gelatin

Hirofumi Miki, R. Nishikata, Y. Oku and S.Tsuchitani

4th World Congress on Materials Science & Engineering ( Scientific Future Group )    56   2018.08  [Refereed]

PVDF micro machining for the high resolution skin-like tactile sensors

Hirofumi Miki, R. Sugii, T. Kawabata, S. Tsuchitani

Proceedings of the International Conference on Sensing Technology, ICST ( IEEE Computer Society )  2017-   1 - 4   2018.02  [Refereed]

　View Summary

This work report PVDF micro machining process by RIE without much loss of its piezoelectric constant. L/S (70/130-μm) of fine structure was realized in this work with high etch rate. O2 mixing feed gases of CF4, CHF3, SF6 and 100 % of O2 were used. At the condition of 100% O2 gas plasma and at a higher of RF power, the better of surface state and higher of aspect ratio structure could be realized.

DOI

A Novel Microneedle Device Having Flexible Substrate and Strong Needles Using PVA and Gelatin

Nishikata Ryota, Miki Hirofumi, Tsuchitani Shigeki

MHS2017: 28th 2017 International Symposium on Micro-Nano Mechatronics and Human Science (From Micro & Nano Scale Systems to Robotics & Mechatronics Systems) ( IEEE Robotics and Automation Society )    63-67   2017.12  [Refereed]

Effect of Intermitted RIE Etching on the Beta-PVDF Film Micro Patterning

Sugii Ryota, Hirofumi Miki, Shigeki Tsuchitani

MHS2017: 28th 2017 International Symposium on Micro-Nano Mechatronics and Human Science (From Micro & Nano Scale Systems to Robotics & Mechatronics Systems) ( IEEE Robotics and Automation Society )    172-176   2017.12  [Refereed]

Development of a new type of fabrication process in microneedles

Yugo Oku, Hirofumi Miki , Shigeki Tsuchitani

MHS2017: 28th 2017 International Symposium on Micro-Nano Mechatronics and Human Science (From Micro & Nano Scale Systems to Robotics & Mechatronics Systems) ( IEEE Robotics and Automation Society )    68-70   2017.12  [Refereed]

Effects of external electric field on spreading of a surfactant on aqueous surface

Shigeki Tsuchitani, Takuya Shuto, Hirofumi Miki, Kunitomo Kikuchi

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY ( AMER CHEMICAL SOC )  254   2017.08

A Novel Tape Testing Method for the Quantitative Adhesion Measurement

Hirofumi Miki, Ryo Yamakuchi and Shigeki Tsuchitani

9th International Conference on Fiber and Polymer Biotechnology ( "International Network on Polymer and Fiber Biotechnology", Co-organized by "European Federation of Biotechnology(EFB)" )    120   2016.09  [Refereed]

Piezoelectric Polymer Film Micromachining for the Application of a High Resolution and High Sensitive Flexible Micro Tactile Sensors

Hirofumi Miki, Yutoku Kawabata, Yunchao Chen, Shigeki Tsuchitani

9th International Conference on Fiber and Polymer Biotechnology ( "International Network on Polymer and Fiber Biotechnology", Co-organized by "European Federation of Biotechnology(EFB)" )    48   2016.09  [Refereed]

Characterization of Biocompatible Thin Gelatin Film and Its Possibility for the Micro Needle Structures

Hirofumi Miki, Hironaga Makinose, Ryota Nishikata, Koji Minehira, Shigeki Tsuchitani

9th International Conference on Fiber and Polymer Biotechnology ( "International Network on Polymer and Fiber Biotechnology", Co-organized by "European Federation of Biotechnology(EFB)" )    118   2016.09  [Refereed]

Biocompatible Gelatin Micro Needle Arrays Having a Flexible Substrate for the Transdermal Drug Delivery Applications

Hirofumi Miki, Ryota Nishikata, Koji Minehira, Shigeki Tsuchitani

9th International Conference on Fiber and Polymer Biotechnology ( "International Network on Polymer and Fiber Biotechnology", Co-organized by "European Federation of Biotechnology(EFB)" )    117   2016.09  [Refereed]