Misc - MIKI Hirofumi

Piezoelectric PVDF Wet Etching Using Polar Solvents as the Etchant

Riko Yoshida, Hirofumi Miki （Part： Corresponding author )

Proceedings of the 35th 2024 International Symposium on “Micro-NanoMechatronics and Human Science” Micro & Nano Scale Systems to Robotics & Mechatronics Systems,     SaP-08   2024.11  [Refereed]

Effects of Applied Load Direction to the Output Behavior of Piezoelectric Fingerprint Sensor

Jippo Kai, Hirohumi Miki （Part： Corresponding author )

Proceedings of 35th 2024 International Symposium on Micro-NanoMechatronics and Human Science     SaP-07   2024.11  [Refereed]

Fabrication Process Technology to Realize Two-layer Thick Structures Using SU-8 3050 Applicable to the Casting Mold of Microneedle Devices

Yusuke Yamamoto, Rina Kusushita, Hirofumi Miki （Part： Corresponding author )

Proceedings of the 35th 2024 International Symposium on “Micro-NanoMechatronics and Human Science” Micro & Nano Scale Systems to Robotics & Mechatronics Systems.     SaP-05   2024.11  [Refereed]

乳癌検出用触診デバイスの構造解析用生体モデルの検討

山崎 智也, 幹 浩文 （Part： Corresponding author )

第40回「センサ・マイクロマシンと応用システム」シンポジウム     8P2-PS-24 - S-177   2023.11  [Refereed]

Study on the Piezoelectric PVDF Film Wet Etching

吉田 理子, 幹 浩文 （Part： Corresponding author )

第40回「センサ・マイクロマシンと応用システム」シンポジウム     7P2-PS-21 - S-069   2023.11  [Refereed]

圧電方式の指紋センサに関する基礎検討

堀口 凱生, 幹 浩文 （Part： Corresponding author )

第40回「センサ・マイクロマシンと応用システム」シンポジウム     6P5-PS-25 - S-064   2023.11  [Refereed]

Research on the piezoelectric PVDF film weteching properties in DMA solution

K. Yoshida, H. Miki

39th Symposium of Sensor・actuators and Application systems   39   16P2-P-21   2022.11  [Refereed]

Electro active chemical Marangoni locomotor

S. Tsuchitani, T. Ikebe, and H. Miki

9th international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles (EuroEAP2019) ( The EuroEAP Society )    21   2019.06  [Refereed]

Electric field control of propulsion force of chemically driven Marangoni locomotor

S. Tsuchitani, T. Ikebe, H. Miki, and K. Kikuchi

ASME 2018 International Mechanical Engineering Congress & Exposition ( The American Society of Mechanical Engineers )    IMECE2018-87233   2018.11  [Refereed]

Etching properties of piezoelectric β-phase poly (vinylidene fluoride) film

Hirofumi Miki, R. Sugii, S.Tsuchitani

4th World Congress on Materials Science & Engineering ( Scientific Future Group )    48   2018.08  [Refereed]

A Novel structure of microneedle device and its fabrication technology by using biocompatible polyvinyl alcohol (PVA) and gelatin

Hirofumi Miki, R. Nishikata, Y. Oku and S.Tsuchitani

4th World Congress on Materials Science & Engineering ( Scientific Future Group )    56   2018.08  [Refereed]

PVDF micro machining for the high resolution skin-like tactile sensors

Hirofumi Miki, R. Sugii, T. Kawabata, S. Tsuchitani

Proceedings of the International Conference on Sensing Technology, ICST ( IEEE Computer Society )  2017-   1 - 4   2018.02  [Refereed]

　View Summary

This work report PVDF micro machining process by RIE without much loss of its piezoelectric constant. L/S (70/130-μm) of fine structure was realized in this work with high etch rate. O2 mixing feed gases of CF4, CHF3, SF6 and 100 % of O2 were used. At the condition of 100% O2 gas plasma and at a higher of RF power, the better of surface state and higher of aspect ratio structure could be realized.

DOI

A Novel Microneedle Device Having Flexible Substrate and Strong Needles Using PVA and Gelatin

Nishikata Ryota, Miki Hirofumi, Tsuchitani Shigeki

MHS2017: 28th 2017 International Symposium on Micro-Nano Mechatronics and Human Science (From Micro & Nano Scale Systems to Robotics & Mechatronics Systems) ( IEEE Robotics and Automation Society )    63-67   2017.12  [Refereed]

Effect of Intermitted RIE Etching on the Beta-PVDF Film Micro Patterning

Sugii Ryota, Hirofumi Miki, Shigeki Tsuchitani

MHS2017: 28th 2017 International Symposium on Micro-Nano Mechatronics and Human Science (From Micro & Nano Scale Systems to Robotics & Mechatronics Systems) ( IEEE Robotics and Automation Society )    172-176   2017.12  [Refereed]

Development of a new type of fabrication process in microneedles

Yugo Oku, Hirofumi Miki , Shigeki Tsuchitani

MHS2017: 28th 2017 International Symposium on Micro-Nano Mechatronics and Human Science (From Micro & Nano Scale Systems to Robotics & Mechatronics Systems) ( IEEE Robotics and Automation Society )    68-70   2017.12  [Refereed]

Effects of external electric field on spreading of a surfactant on aqueous surface

Shigeki Tsuchitani, Takuya Shuto, Hirofumi Miki, Kunitomo Kikuchi

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY ( AMER CHEMICAL SOC )  254   2017.08

A Novel Tape Testing Method for the Quantitative Adhesion Measurement

Hirofumi Miki, Ryo Yamakuchi and Shigeki Tsuchitani

9th International Conference on Fiber and Polymer Biotechnology ( "International Network on Polymer and Fiber Biotechnology", Co-organized by "European Federation of Biotechnology(EFB)" )    120   2016.09  [Refereed]

Piezoelectric Polymer Film Micromachining for the Application of a High Resolution and High Sensitive Flexible Micro Tactile Sensors

Hirofumi Miki, Yutoku Kawabata, Yunchao Chen, Shigeki Tsuchitani

9th International Conference on Fiber and Polymer Biotechnology ( "International Network on Polymer and Fiber Biotechnology", Co-organized by "European Federation of Biotechnology(EFB)" )    48   2016.09  [Refereed]

Characterization of Biocompatible Thin Gelatin Film and Its Possibility for the Micro Needle Structures

Hirofumi Miki, Hironaga Makinose, Ryota Nishikata, Koji Minehira, Shigeki Tsuchitani

9th International Conference on Fiber and Polymer Biotechnology ( "International Network on Polymer and Fiber Biotechnology", Co-organized by "European Federation of Biotechnology(EFB)" )    118   2016.09  [Refereed]

Biocompatible Gelatin Micro Needle Arrays Having a Flexible Substrate for the Transdermal Drug Delivery Applications

Hirofumi Miki, Ryota Nishikata, Koji Minehira, Shigeki Tsuchitani

9th International Conference on Fiber and Polymer Biotechnology ( "International Network on Polymer and Fiber Biotechnology", Co-organized by "European Federation of Biotechnology(EFB)" )    117   2016.09  [Refereed]

IPMC Actuators Fabricated Using MEMS Technology

S. Tsuchitani, K. Kikuchi, I. Shimizu, T. Taniguchi, and H. MIki

CIMTEC 2016 - 7th Forum on New Material ( National Research Council, Italy )    2016.06  [Refereed]

マランゴニ効果を用いた自発運動機構の電界による制御の可能性の検討

首藤拓也, 土谷茂樹, 幹浩文, 菊地邦友

日本機械学会関西支部 関西学生会 平成27年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 (関西学生会) )    10P16 (pp.10-16)   2016.03

ジルコニア粒子を分散させたシリコーンエラストマーを用いた誘電エラストマーアクチュエータ

松下岳史, 土谷茂樹, 菊地邦友, 幹浩文

日本機械学会関西支部 関西学生会 平成27年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 (関西学生会) )    5P12 (pp.5-12)   2016.03

ジルコニア粒子分散セルムエラストマーを用いた誘電エラストマーアクチュエータ

赤尾拓哉, 土谷茂樹, 菊地邦友, 幹浩文

日本機械学会関西支部 関西学生会 平成27年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 (関西学生会) )    5A21 (pp.5-6)   2016.03

粘弾性を考慮した誘電エラストマーアクチュエータ－質量系の動的駆動解析

木戸佑輔, 土谷茂樹, 菊地邦友, 幹浩文

日本機械学会関西支部 関西学生会 平成27年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 (関西学生会) )    17P16 (pp.17-17)   2016.03

エラストマーとばねの直列引張構造をもつ誘電エラストマーアクチュエータの粘性を考慮した動作解析

岩政 宏紀, 土谷 茂樹, 幹 浩文, 菊地 邦友

第16回計測自動制御学会システムインテグレーション部門講演会(SI2015) ( 公益社団法人計測自動制御学会 )    1H1-3   2015.12

BaTiO3粒子を分散させた誘電エラストマーアクチュエータ用環動高分子の材料特性に及ぼす粒径の影響

谷口 周平, 土谷 茂樹, 幹 浩文, 菊地 邦友

第16回計測自動制御学会システムインテグレーション部門講演会(SI2015) ( 公益社団法人計測自動制御学会 )    1H1-2   2015.12

Effects of Nozzle Shape on Propulsion of A Chemical Locomotor Using Ionic Liquids

S. Tsuchitani, Y. Shakado, H. Miki, and K. Kikuchi

ASME 2015 International Mechanical Engineering Congress & Exposition ( ASME (American Society of Mechanical Engineers) )    IMECE2015-51085   2015.11  [Refereed]

ロール状誘電エラストマーアクチュエータの作製と評価

吉田和正, 谷口周平 , 菊地邦友, 幹浩文, 土谷茂樹

日本機械学会関西支部 関西学生会 平成26年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 関西学生会 )    1P16 (pp.1-15)   2015.03

イオン導電性高分子薄膜センサの周波数特性解析

石原大地, 菊地邦友, 幹浩文, 森岡大地, 土谷茂樹

日本機械学会関西支部 関西学生会 平成26年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 関西学生会 )    3A25 (pp.3-10)   2015.03

形状記憶ポリマー一体型イオン導電性高分子アクチュエータの開発

横井和哉, 菊地邦友, 幹浩文, 森岡大地, 土谷茂樹

日本機械学会関西支部 関西学生会 平成26年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 関西学生会 )    6P22 (pp.6-18)   2015.03

誘電エラストマーアクチュエータとバネの直列アクチュエータの動作解析

岩政宏紀, 谷口周平 , 菊地邦友, 幹浩文, 土谷茂樹

日本機械学会関西支部 関西学生会 平成26年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 関西学生会 )    16A15 (pp.16-5)   2015.03

イオン導電性高分子金属接合体を使用したソフトグリッパの開発

中川雄貴, 菊地邦友, 幹浩文, 森岡大地, 土谷茂樹

日本機械学会関西支部 関西学生会 平成26年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 関西学生会 )    4P24 (pp.4-19)   2015.03

低侵襲医療用マイクロ触診プローブの基礎研究

幹浩文

第23回わかやまテクノ・ビジネスフェア わかやま発技術シーズ発表会(11/12) ( 公益財団法人わかやま産業振興財団・一般社団法人和歌山情報サービス産業協会 )    パネルディスカション   2014.11

医療デバイスへの応用志向触覚センサ基礎研究

幹浩文

和歌山大学・大阪府立大学工学研究シーズ合同発表会 (11/10) ( 和歌山大学・大阪府立大学 )    28   2014.11

Effects of electric field on friction on silicon dioxide

S. Tsuchitani, T. Hayashida, T. Inoue, H. Miki, and K. Kikuchi

7th International Colloquium Micro-Tribology 2014 ( Polish Society of Tribology, Warsaw University of Technology )    29   2014.09  [Refereed]

Effects of anions used in ion-exchange process on operating characteristics of Nafion®-based IPMC with ionic liquids

Daichi Morioka, Kunitomo Kikuchi, Hirofui Miki, Shigeki tsuchitani

IUMRS-ICA2014 The 15th IUMRS International Conference in Asia ( MRS-J (The Material Research sciety of Japan) )    B7-O26-003   2014.08  [Refereed]

Characterization of the Electromechanical Properties of Miniaturized Ionic Conductive Polymer Actuator Fabricated by a Selective Plasma Treatment Method

Kunitomo Kikuchi, Tomohisa Taniguchi, Daichi Morioka, Hirofumi Miki, Shigeki Tsuchitani

IUMRS-ICA2014 The 15th IUMRS International Conference in Asia ( MRS-J (The Material Research sciety of Japan) )    B7-I27-005   2014.08  [Refereed]

Fabrication and evaluation of dielectric elastomer actuators using the two-component SeRM elastomer

Shuhei Taniguchi, Kikuchi Kunitomo, Hirofumi Miki and Shigeki Tsuchitani

IUMRS-ICA (International Union of Materials Research Societies, International Conference in Asia) ( MRS-J (The Material Research sciety of Japan) )    B7-O27-003   2014.08  [Refereed]

Microstructure Array on Thin Organic Functional Material by Ion Beam

Hirofumi Miki, Y. Takai, G. Matsui, M.Kanda, K. Kikuchi, S. Tsuchitani,

IUMRS-ICA2014 The 15th IUMRS International Conference in Asia ( MRS-J (The Material Research sciety of Japan) )    178 D1-P26-004   2014.08  [Refereed]

Spreading of ionic liquids on aqueous surface

Shigeki Tsuchitani, Taiga Fukutake, Hirofumi Miki, Kunitomo Kikuchi

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY ( AMER CHEMICAL SOC )  248   2014.08

Dry Etching of β-PVDF Film for the Application of Minimally Invasive Surgery (MIS) Palpation Microsensor

Hirofumi Miki, Y. Takai, G. Matsui, M.Kanda, K. Kikuchi, S. Tsuchitani

APCOT 2014 The 7th Asa-Pacific Conference on Transducers and Micro/Nano Technology ( The Society of Micro and Nano Systems; The Korean Sensors Society )    76 (P1-81)   2014.07  [Refereed]

A Novel Pumping Device for the Functional Inkjet System

Hirofumi Miki, S. Murai, R. Tsuji, K.Kikuchi, S. Tsuchitani

APCOT 2014 The 7th Asa-Pacific Conference on Transducers and Micro/Nano Technology ( The Society of Micro and Nano Systems; The Korean Sensors Society )    117 (P2-14)   2014.07  [Refereed]

Effects of repeated plating process on electro-mechanical response of a perfluorocarboxylic ionic polymer actuator containing ionic liquids

Kunitomo Kikuchi, Changhon Kim, Daichi Morioka, Hirofumi Miki, Shigeki Tsuchitani 【 ページ 】

EuroEAP 2014: 4th international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles ( European Scientific Network for Artificial Muscles - ESNAM )    33-34 (1.3.15)   2014.06  [Refereed]

酸化チタンを分散させた誘電エラストマーとこれを用いたアクチュエータの作製

堀 大, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成25年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    5A11   2014.03

誘電エラストマーアクチュエータの動作特性に及ぼす柔軟電極の効果に関する解析

松藤 裕起, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成25年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    5A21   2014.03

イオン導電性変位センサの動作特性に対する速度および変位量の影響

藤本 勇輝, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成25年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    5P13   2014.03

イオン液体を用いたイオン導電性高分子アクチュエータの動作特性に対するアニオンの影響

森岡 大地, 菊地 邦友, 土谷 茂樹, 幹 浩文

日本機械学会関西支部関西学生会 平成25年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    5P12   2014.03

相互侵入高分子網目構造を有する誘電エラストマーアクチュエータの開発

湯川 候士, 菊地 邦友, 土谷 茂樹, 幹 浩文

日本機械学会関西支部関西学生会 平成25年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    5A22   2014.03

2液型セルムエラストマーを用いた誘電エラストマーアクチュエータの作製と特性評価

谷口 周平, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成25年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    5P23   2014.03

J1110101 Effects of electric field on lubrication properties of ultra thin ionic liquid film

HAYASHIDA Takahiro, TSUCHITANI Shigeki, MIKI Hirofumi, KIKUCHI Kunitomo

The Proceedings of Mechanical Engineering Congress, Japan ( The Japan Society of Mechanical Engineers )  2014 ( 0 ) _J1110101 - -_J1110101-   2014

　View Summary

Friction and wear arise in contact sliding parts of machines, increases in wear and deformation of the sliding parts caused by frictional heat. Induce mechanical failure lubricants are used to prevent these problems, but lubricant is evaporated or decomposed by frictional heat. In recent years, ionic liquids are attracting much attention as new lubricants. Ionic liquids have various non-conventional physical and chemical characteristics. We used three types of imidazolium ionic liquids: BMI-PF_6 (1-Butyl-3-methylimidazolium hexafluorophosphate), HMI-PF_6 (1-Hexyl-3-methylimidazolium hexafluorophosphate), OMI-PF_6 (1-Octyl-3-methylimidazolium hexafluorophosphate) with different alkyl chain length. They were coated on Si substrates with SiO_2 layer on the surface. We measured frictional force between the substrate coated with the ionic liquid and AFM (atomic force microscope) conductive tip as voltages were applied between them. It was confirmed that frictional force increased by applying voltages. The sample coated with HMI-PF_6 exhibited the largest increase in frictional force when voltages are applied.

DOI

J1130102 Effect of magnetic field on the convection of aqueous solution of magnetic ionic liquid

MUKAI Daiki, TSUCHITANI Shigeki, MIKI Hirofumi, KIKUCHI Kunitomo

The Proceedings of Mechanical Engineering Congress, Japan ( The Japan Society of Mechanical Engineers )  2014 ( 0 ) _J1130102 - -_J1130102-   2014

　View Summary

Recentlt, self-motion is attracting attentions as a new motion mechanism that does not require energy supply from outside. Micro self-motion mechanism, in expected to be applied to transportations of small bodies in the water and environmental sensing devices. Among them, driving method using surface tension gradient on water surface are known. By using ionic liquids with ampliphilic chemical structure which can modify surface tention of water surface, the object can be driven by converting chemical energy into mechanical energy directly. We already, confirmed that small objects depositing an imidazolium-based ionic liquid [bmim][PF_6] (1-butyl-3-methylimidaz-olium hexafluorophosphate) moved spontaneously on water surface. In this study, by using a magnetic ionic liquid [bmim][FeCl_4](1-buthyl-3-methylimidazoium Tetrachloroferrate) containing a magnetic anion, we examined a potential application to control the direction of the self-motion by applying magnetic field.

DOI

J1130101 Optimal design of mechanism of self-motion using ionic liquid

SHAKADO Yoshifumi, TSUCHITANI Shigeki, MIKI Hirofumi, KIKUCHI Kunitomo

The Proceedings of Mechanical Engineering Congress, Japan ( The Japan Society of Mechanical Engineers )  2014 ( 0 ) _J1130101 - -_J1130101-   2014

　View Summary

Recently, the self-motion mechanism has attracted attention as a new motion mechanism. By realizing micro self-moving bodies which don't need energy supply from the outside and one equipped with a power source, applications of them to environmental sensing device, and transportation equipments of small objects on water surface, are possible. Since it has been reported that the self-motion on water surface in possible by using an ionic liquid [BMIM][PF_6] (1-butyl-3-methylimidazolium hexafluorophosphate) an a fuel which causes surface tension gradient on water surface and generate propulsion force, we focused on self-motion using ionic liquids. To establish method to control driving force, driving time and moving direction of this micro self-motion mechanism powered by ionic liquids. We measured driving force of a locomotion which has a nozzle to report ionic liquid on water surface and evaluated effects of the shape of the nozzle.

DOI

イオン液体を含有したフレミオンベースのＩＰＭＣの電気機械特性に与える電極めっき回数の影響

金 壯憲,菊地 邦友,幹 浩文,土谷 茂樹

第14回 計測自動制御学会 システムインテグレーション部門講演会 (SI2013) ( 公益社団法人計測自動制御学会システムインテグレーション部門 )    3I3-4   2013.12

チタン酸バリウム粒子を分散させた誘電エラストマーアクチュエータ用環動高分子の電気機械的特性評価

砂原 時春,土谷 茂樹,菊地 邦友,幹 浩文

自動制御学会 システムインテグレーション部門講演会 (SI2013) ( 公益社団法人計測自動制御学会システムインテグレーション部門 )    3I3-2   2013.12

微細パターンを有するイオン導電性高分子アクチュエータの作製精度向上と特性評価

谷口 智久,菊地 邦友,幹 浩文,土谷 茂樹

第14回 計測自動制御学会 システムインテグレーション部門講演会 (SI2013) ( 公益社団法人計測自動制御学会システムインテグレーション部門 )    3I3-5   2013.12

Evaluation of driving characteristics of miniaturized ionic polymer actuator fabricated by a selective plasma treatment method

Kunitomo Kikuchi, Tomohisa Taniguchi, Hirofumi Miki, Shigeki Tsuchitani

EuroEAP 2013: Third international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles ( the ‘European Scientific Network for Artificial Muscles (ESNAM)’ - COST Action MP1003 )    1.3.15   2013.06

Dielectric elastomers with photopolymerized interpenetrating networks

Shigeki Tsuchitan, Satoshi Oda, Kunitomo Kikuchi, Hirofumi Miki

EuroEAP 2013: Third international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles ( European Scientific Network for Artificial Muscles (ESNAM) )    1.3.6   2013.06  [Refereed]

イオン導電性高分子金属接合体のセンサ特性における寸法・湿度の影響

田中 雄一郎, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    6A22   2013.03

高分解能を有した触覚センサのためのPVDF微細加工技術の開発

神田 宗章, 土谷 茂樹, 幹 浩文, 菊地 邦友

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    16P15   2013.03

高分解能を有した触覚センサのためのPVDF微細加工技術の開発

神田 宗章, 幹 浩文 etc.

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    16P15   2013.03

DEAの動作特性に及ぼすプレストレインの効果に関する解析

若狭 淳, 土谷 茂樹, 菊地 邦友, 幹浩文

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    14A26   2013.03

マイクロカテーテル用小型一酸化窒素センサの開発

向井 大生, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    14P25   2013.03

フォトレジストSU-8への機能性付与

釈迦戸 祥史, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    6A21   2013.03

ポリピロールアクチュエータを用いた空気中駆動可能な能動マイクロカテーテルの開発

石原 拓明, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    14P24   2013.03

ポリピロールをアクチュエータとするダイヤフラム型マイクロポンプの研究

林田 隆寛, 土谷 茂樹, 菊地 邦友, 幹 浩文

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    18A25   2013.03

有限要素解析によるイオン導電性高分子アクチュエータの形状効果の検討と評価

廣田 滉平, 菊地 邦友, 土谷 茂樹, 幹 浩文

日本機械学会関西支部関西学生会 平成24年度学生員卒業研究発表講演会 ( 日本機械学会関西支部 )    14P11   2013.03

イオン液体を動力源とする自発運動機構に関する研究

福武大河、菊地邦友、幹浩文、土谷茂樹

平成24年度和歌山大学システム工学部・近畿大学生物理工学部大学院生研究成果発表会 ( (公財)和歌山産業振興財団、(一社)和歌山情報サービス産業協会 )    2013.02

ドライプロセス加工によるイオン導電性高分子アクチュエータのパターン化

谷口智久、菊地邦友、幹浩文、土谷茂樹

平成24年度和歌山大学システム工学部・近畿大学生物理工学部大学院生研究成果発表会 ( (公財)和歌山産業振興財団、(一社)和歌山情報サービス産業協会 )    2013.02

環動高分子を用いた誘電エラストマーアクチュエータの開発

砂原時春、菊地邦友、幹浩文、土谷茂樹

平成24年度和歌山大学システム工学部・近畿大学生物理工学部大学院生研究成果発表会 ( (公財)和歌山産業振興財団、(一社)和歌山情報サービス産業協会 )    2013.02

J114014 Study on Mechanism of Self-motion Powered an Ionic Liquid

FUKUTAKE Taiga, TSUCHITANI Shigeki, KIKUCHI Kunitomo, MIKI Hirofumi

The Proceedings of Mechanical Engineering Congress, Japan ( The Japan Society of Mechanical Engineers )  2013 ( 0 ) _J114014 - 1-_J114014-5   2013

　View Summary

Recently, as a new motion mechanism, the self-motion mechanism has attracted attention. By realizing micro self-motion mechanism being not required energy supply from the outside and equipped with a power source, the application in the water is expected to environmental sensing device, transport of small objects and so on. Self-motion mechanism uses the surface tension of water (cohesive force of water), and it is the mechanism to convert chemical energy to mechanical energy directly. However in the water, since the effect of viscous resistance is increased by reducing the moving body, it is required for self-motion mechanism that energy sources to generate the movement of high efficiency, large driving force, and long time. Then, since it has been reported that the self-motion of the object by attaching the ionic liquid [BMIM][PF_6] (1-butyl-3-methylimidazolium hexafluorophosphate) on the water, we focused on self-motion using ionic liquids. Thus, we intended to establish a method to control micro self-motion mechanism powered by ionic liquids. In this study, we measured the surface tension and observed the Spreading by using four ionic liquids.

DOI

918 Effects of electric field on lubrication properties of ionic liquid thin films.

TOGANO Takeshi, TUCHITANI Shigeki, KIKUCHI Kunitomo, MIKI Hirofumi

The Proceedings of Conference of Kansai Branch ( The Japan Society of Mechanical Engineers )  2013 ( 0 ) _9 - 18_   2013

DOI

UV重合を利用した相互侵入高分子網目構造を有する誘電エラストマーの電気・機械特性評価

小田 慧, 菊地 邦友, 幹 浩文, 土谷 茂樹

第13回 計測自動制御学会 システムインテグレーション部門講演会(SI2012) ( 計測自動制御学会 (システムインテグレーション部門) )    1N4-6   2012.12

誘電エラストマーアクチュエータ用環動高分子材料の電気機械的特性評価

砂原 時春, 土谷 茂樹, 菊地 邦友, 幹 浩文

第13回 計測自動制御学会 システムインテグレーション部門講演会(SI2012) ( 計測自動制御学会 (システムインテグレーション部門) )    1N4-5   2012.12

微細構造を有するパター ン化IPMCの作製手法の開発

谷口 智久, 菊地 邦友, 幹 浩文, 土谷 茂樹

第13回 計測自動制御学会 システムインテグレーション部門講演会(SI2012) ( 計測自動制御学会 (システムインテグレーション部門) )    1N3-3   2012.12

Thermal Magnetic Inkjet Mechanism for the Application of Micro Pattern Fabricatin on the Highly Unlevel Micro area

Hirofumi Miki (Han), K. Kikuchi and S. Tsuchitani

23rd 2012 International Symposium on Micro-NanoMechatronics and Human Science ( IEEE Robotics and Automation Society )    2月9日   2012.11  [Refereed]

EFFECTS OF ELECTRIC FIELD ON FRICTION OF THIN IONIC LIQUID FILMS

Shigeki Tsuchitani, Takeshi Togano, Kunitomo Kikuchi and Hirobumi Han

6th International Colloquium MICRO-TRIBOLOGY 2012 ( Warsaw University of Technology (Faculty of Mechatronics, Institute of Micromechanics and Photonics), Polishi Society of Tribology )    24 (Session 3-4)   2012.09  [Refereed]

Novel Inkjet Mechanism Using Pulsed Thermal-magnetic Driving

Hirofumi Han, Murai Shinya, Kunitomo Kikuchi, Shigeki Tsuchitani, Yasuhiro Kosimoto

InterMag2012 IEEE International Magnetics Conference ( IEEE )    HU10   2012.07  [Refereed]

　View Summary

A novel type of inkjet mechanism was proposed having simple structure, small size and strong pumping power. ther working mechansim and the simulation results by analysis and experiment are reported.

Active catheter using a conductive polymer actuator driven in air

S. Tsuchitani, Y. Hanayama, K. Kikuchi, Hirofumi Han

EuroEAP 2012: Second international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles ( EAP )    1.3.9   2012.05  [Refereed]

Improvement of a formation method of patterned electrodes for IPMC by Selective plasma treatment

K. Kikuchi, T. Taniguchi, Hirofumi Han, S. Tsuchitani

EuroEAP 2012: Second international conference on Electromechanically Active Polymer (EAP) transducers & artificial muscles ( EAP )    1.3.6   2012.05  [Refereed]

誘電エラストマーアクチュエータの電気的特性評価

秋山 将人(和歌山大),土谷 茂樹,菊地 邦友,幹 浩文

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    2118   2012.03

金属薄膜の密着性評価におけるテープ試験の定量化について

山口 亮 (和歌山大),幹 浩文,菊地 邦友,土谷 茂樹

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    811   2012.03

PVDF-HFP多孔質体を駆動電解質として用いた空気中駆動型アクチュエータの開発

福原 佑樹(和歌山大),土谷 茂樹,菊地 邦友,幹 浩文

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    2107   2012.03

円筒露光装置の開発

大西 清隆(和歌山大),土谷 茂樹,菊地 邦友,幹 浩文

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    2003   2012.03

積層型誘電エラストマーアクチュエータの開発

田中 慎也(和歌山大),土谷 茂樹,菊地 邦友,幹 浩文

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    2121   2012.03

KrFエキシマレーザーによるPVDF(ポリフッ化ビニリデン)の導電性実現に伴う圧電特性への影響

東 孝明(和歌山大),幹 浩文,菊地 邦友,土谷 茂樹

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    819   2012.03

PDMSを用いた静電駆動型マイクロポンプの作製

福武 大河(和歌山大),土谷 茂樹,菊地 邦友,幹 浩文

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    2105   2012.03

針強度と基板柔軟性を両立するマイクロニードルの開発

清水 幸平(和歌山大),幹 浩文,菊地 邦友,土谷 茂樹

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    804   2012.03

プラズマ照射によるイオン交換膜の改質を用いたイオン導電性高分子アクチュエータのパターン電極の作製と評価

谷口 智久(和歌山大),土谷 茂樹,菊地 邦友,幹 浩文

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    2106   2012.03

β型PVDFフィルムの微細構造加工技術について

松井 元(和歌山大),幹 浩文,菊地 邦友,土谷 茂樹

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    716   2012.03

ロボット用ロール型誘電エラストマーアクチュエータの開発

砂原 時春(和歌山大),土谷 茂樹,菊地 邦友,幹 浩文

関西学生会平成23年度学生員卒業研究発表講演会 ( 機械学会関西支部 )    2119   2012.03

IPMC の電気機械特性に与えるイオン交換時の溶媒の影響

金 壯憲, 中村 佳寛, 岡本 正臣, 菊地 邦友, 幹 浩文, 土谷 茂樹, 安積 欣志

第12回 計測自動制御学会 システムインテグレーション部門講演会 (SI2011) ( 計測自動制御学会 )    2J2-2   2011.12

PVDF film micro fabrication for the robotics skin sensor having flexibility and high sensitivety

Hirofumi Miki (Han), Yuusaku Nakagawa, Yasuyuki Takai, Kunitomo Kikuchi, Shigeki Tsuchitani （Part： Lead author,　Last author,　Corresponding author )

2011 Fifth International Conference on Sensing Technology ( IEEE )    639-643   2011.11  [Refereed]

誘導反発を用いた物体の安定浮上と移動制御

近多健輔・鈴木 新・幹 浩文・越本泰弘

平成23年電気学会全国大会 3月16日-3月18日 ( 電気学会 )  327   5-224   2011.03

C-5-3 磁気サスペンション及び板ばねを用いた触覚センサの基礎検討

村井伸哉・越本泰弘・幹 浩文

電子情報通信学会2010年総合大会 ( 電子情報通信学会 )    C-5-3   2010.03

Research of multipole selector with traveling wave

Tomonori Nakamoto, Hirofumi Miki (Han) and Yasuhiro Koshimoto

The 14th 「Intelligence mechatronics workshop」     40-43   2009.09

Vertical Magnetic Field Sensor configured Glancing Angle Sputtering

S.Kobayashi, Hirofumi Miki (H.Han), Y.Koshimoto

The 14th 「Intelligence mechatronics workshop」     114-117   2009.09

Functional Magnetic Nanowires using Nanoholes

Masahiro Matsuba, Hirofumi Miki (Han), Yasuhiro Koshimoto

The 14th 「Intelligence mechatronics workshop」     86-89   2009.09

Eddy current repulsion and its sensor application by using ring gap magnetic circuit

T.takeda, T Nakao, Hirofumi Miki (Han), Y. Koshimoto

The Papers of Technical Meeting on Magnetics, IEE Japan     39~41   2008.10

Electrostatic acceleration of the flying droplet

Yasuhiro Nishimura, Hirofumi Miki (Hiro. Han) and Yasuhiro Koshimoto

電子情報通信学会 2008.3     C-5-14   2008.03

Characteristics of thermal-type fingerprint sensor

Hirofumi Miki (Hiro (J.S). Han), Yauhiro Koshimoto

SPIE Proceedings "Biometric technology for human identification V" 18-19 March 2008 Orlando, Florida, USA ( SPIE )    Proc. of SPIE Vol. 6944 69440P1-12   2008.03  [Refereed]

Magnetic fluid pump by using thermo-magnetic effect

Shinya muraii, Hirofumi Miki (Hiro. Han) and Yasuhiro Koshimoto

電子情報通信学会 2008.3     C-5-13   2008.03

Basic study of photothermal magnetic drive micro actuator

Takashi Ohkawa Hirofumi Miki (Hiro. Han) and Yasuhiro Koshimoto

電子情報通信学会 2008.3     C-5-12   2008.03

Non-contact micro bearing by using eddy current levitaion

T. Nakao, Hirofumi Miki (J. Han), Y.Koshimoto

Digests of the 31th annul conference on MAGNETICS 2007     105   2007.09

Research on micro tweezers driving by electromagnetic

A. Kimura, D Takanaka, Y. Naka, Hirofumi Miki (J. Han), Y. Koshimoto

Digests of the 31th annul conference on MAGNETICS 2007     107   2007.09

Tactile sensor by utilizing magnetic suspension

Tuty Rahiza Sajat, Hirofumi Miki (J. Han), Y. Koshimoto

Digests of the 31th annul conference on MAGNETICS 2007     106   2007.09

Sensitivity improvement of SPR sensor by using double fibers

Masanao saito, Hirofumi Miki (Ji-song Han), Yasuhiro Koshimoto

電子情報通信学会     c-3-23 p179   2007.03

Large displacement novel structure by using MEMS technology

Hiroyuki Honda, Hirofumi Miki (Ji-song Han), Yasuhiro Koshimoto

電子情報通信学会     C-5-10 p10   2007.03

Thermal-type micro sensor array on PI film substrate having wet-etched through-holes for interconnection

JS Han, ZY Tan, K Sato, M Shikida

BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 ( IEEE )  June 9-12, pp.1614-1617   1614 - 1617   2003

　View Summary

We proposed an ultra-thin structure of thermal-type micro sensor array having excellent thermal isolation and sensitivity by using 25similar to50-mum-thick polyimide (PI) film as the substrate. The device also has the attractive features of mechanical flexibility allowing three-dimensional packaging. For vertical interconnects, microvia holes (diameter <100mum) were made by PI film wet etching. Arrayed heater elements with 0.1-mum-thick nickel film were formed by using lift-off technology, and electrical feed-through with 2-mum-thick Cu film were formed by electroless Cu-plating. Heater elements (front side) and electrical feed-through (backside) were interconnected through the fabricated microvia holes using electroless Cu-plating. Fabricated heater elements (Ni) showed good adhesion with the PI film substrate, and its temperature coefficient of resistance (TCR) was 2600ppm. Because of the small thermal capacity and good thermal isolation, the sensor also showed high thermal response of less than 0.4mus when 280mV/10mus of pulse voltage was applied to the heater elements.

New structure and fabrication process for thermal-type microsensors

JS Han, T Kadowaki, K Sato, M Shikida

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VII ( SPIE-INT SOC OPTICAL ENGINEERING )  4557   386 - 394   2001

　View Summary

We describe the structure and fabrication of a one-dimensionally arrayed high density thermal-type micro fingerprint sensor. To provide thermal isolation, we designed and fabricated two sets of insulation cavities for each heater element, one for reducing the heat-transfer from the heater to the substrate, and the other one for that of heat to the wiring. The first set of cavities were etched under each heater bridge, leaving an SiO2 diaphragm with the heater bridge on it, and laterally penetrating with the cavities of neighboring heater bridges. The second ones were etched at the both ends of each heater element, leaving a set of SiO2-wiring bridges. This SiO2-wiring bridge structure was used as a thermal isolator when performing a metal-film wiring. The wiring (an electrical feed-through) was formed by a lift-off method, and runs on the SiO2 insulation surface from the heater element to the bonding pad through the SiO2-wiring bridges. The fabricated sensor device was made on a (100) SOI (silicon-on-insulator) wafer. Each heater element was 5x17x50 ( mum(3)) with a pitch of 80 gm. Because of its small thermal capacity and effective thermal isolation, the sensor element was very sensitive. When a 0.4-V/20-mus pulse-voltage was applied to the heater elements, their resistance reached a steady maximum value in about 4similar to5 p. This level of sensitivity will be useful in variety of thermal sensors, such as micro temperature sensors and micro flow sensors, in addition to the thermal-type fingerprint sensors.

Analysis of Strcture & Material-Property Effects On a Thermal Type Fingerprint Sensor

Electrical Society micromachining conference   MM-00-2   7 - 12   2000

アレイしたマイクロヒーター素子を持つ熱型指紋センサーの加工プロセスおよび実験研究

センサー、マイクロマシンと応用システム第17回シンポジュウム2000     345 - 350   2000

Thermal type fingerprint sensor having arrayed heater elements : Ji-song Han, T.Kadowaki, K.Sato, M.Shikida

Technical Digest of the 17^th Sensor Symposium 2000 Kawasaki, May 30-31   pp.345-350   2000

Analysis of structure & material-property effects on a thermal type fingerprint sensor : Ji-song Han, T.Kadowaki, K.Sato, M.Shikida

電気学会研究会資料 MM-00-1~8（マイクロマシン研究会）   2002.2.28, pp.7-12   2000

熱型指紋センサーにおける構造と物性の効果解析

マイクロマシン研究会   MM-00-2   7 - 12   2000

Thermal Type Fingerprint Sensor Having Arrayed Heater Elements

Technical Digest of the 17th Sensor Symposium 2000     345 - 350   2000

Thermal analysis of fingerprint sensor having a micro-heater array : Ji-song Han, T.Kadowaki, K.Sato, M.Shikida

International Symposium on Micromechtronics and Human Science (MHS'99) Nagoya Congress Center & Nagoya Municipal Industrial research Institute   Novenber 23-26, pp.199-205   1999

Thermal Analysis of Fingerprint Sensor Having a Microheater Array

Ji Song Han, Tadashi Kadowaki, Kazuo Sato, Mitsuhiro Shikida

IEEE, MHS'99 ( IEEE )    199 - 205   1999

　View Summary

For the purpose of properties security, in particular of information systems, demands for portable fingerprint sensors are increasing. We proposed a new type of fingerprint sensor having an arrayed microheater, and successfully fabricated one-dimensional array of sensor elements on a silicon wafer using micromachining technologies. Electric resistance of each heater element is measured as signals of temperature difference between elements that are in contact or non-contact with ridges of the fingerprints. In this paper, we analyzed thermal characteristics of our sensor device using computer modeling. Effects of the following parameters were investigated
cavity under heater, SiO2 film between heater and sensor base, heater size, input power and pulse time duration applied to the heater, material properties contacting to sensor surface etc. We concluded that making cavities under the microheater elements and having SiO2 film layer between heater element and sensor base both for the purpose of thermal insulation, is necessary to realize the performance of the proposed sensor system. From the simulation results, it was clarified that such a miniaturized heater element will work quite effective for detecting fingerprint patterns.

Fingerprint sensor with arrayed micro-heater elements : K.Sato, T.Kadowaki, Ji-song Han, M.Shikida

Tech. Dig. Of The 10^th International Conference on Solid-State Sensors and Acuators (Transducers'99)Sendai, Japan   June, 7-10, pp.1874-1875   1999

アレーしたマイクロヒーター素子を持つ指紋センサーの熱特性解析

マイクロメカトロニクストヒューマンサイエンス     199 - 205   1999